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Quality Inspection Services (Leak Test / FARO Measurement)
We provide high-precision quality inspection services integrating Helium Leak Testing and FARO 3D Measurement, ensuring superior airtightness and dimensional accuracy for semiconductor and high-spec industrial applications.
Service Scope
Helium Leak Test
Service content:
- Mass Spectrometer Method
- Vacuum component / welded parts / piping airtightness testing
- Semiconductor gas system (VMB / VMP / Gas Line) detection
- Customized leakage standard (≤1×10⁻⁹ atm·cc/sec)
- Cleanroom assembly and nitrogen purging
- Complete documentation package (welding history / Leak Test report / material certification)
Service value:
- Ensure zero leakage risk
- Improve the reliability of vacuum and gas systems
- Compliant with SEMI / Semiconductor Process Standards
Three-dimensional measurement
Service content:
- FARO Portable CMM
- Precision dimensional and geometric tolerance analysis (GD&T)
- Measurement of complex curved surfaces and irregularly shaped parts
- CAD Comparison and Deviation Analysis
Service value:
- μm-level accuracy verification
- Rapid measurement, shortening detection time
- Provide complete data reports and traceability
Saturation pressure leak detector
Service content:
- Positive/negative pressure airtightness test (pressure decay method)
- Inspection of seals, valves and fluid components
- Production Line QC (Production Line QC)
- Custom pressure and judgment condition settings
Service value:
- High-efficiency testing (suitable for mass production)
- Lower cost than helium testing (for initial screening purposes)
- It can quickly screen out defective products.
Particle Data System
Service content:
- Particulate Counting and Pollution Analysis
- Cleanliness testing of gas pipelines and fluid systems
- Semiconductor process contamination control verification
- Meets ISO/SEMI cleanroom standards
Service value:
- Reduce process contamination risk
- Improve product yield and stability
- Ensure high cleanliness process requirements