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- Pumping Line
- Pumping Line
Pumping Line
Pumping Line
Pumping Line
- Features
- Provides stable evacuation path from process chamber to vacuum pump
- Minimizes pressure loss and improves pumping efficiency
- Suitable for semiconductor, optoelectronics, and high-vacuum systems
- Designed for high temperature, high flow, and corrosive gas environments
Description
The Pumping Line is a high-vacuum stainless steel welded piping assembly manufactured with precision bending and full-penetration welding to ensure leak-tight integrity and structural strength. Custom configurations including straight spools, elbows, bellows, supports, and multi-port modules are available to meet UHP and vacuum system integration requirements.
| Size Range | 10A ~ 100A |
| Inch Equivalent | 3/8" ~ 4" |
| Material | SUS304 / SUS316L |
| Connection Type | ISO-KF / ISO-F / CF / Custom Flange |
| Surface Finish | Pickled & Passivated / Optional EP |
| Leak Rate | ≤ 1×10⁻⁹ mbar·L/s |
| Operating Pressure | Vacuum to 1 bar |
| Operating Temperature | -20°C to 400°C (depending on material) |
| Size Range | 10A ~ 100A |
| Inch Equivalent | 3/8" ~ 4" |
| Material | SUS304 / SUS316L |
| Connection Type | ISO-KF / ISO-F / CF / Custom Flange |
| Surface Finish | Pickled & Passivated / Optional EP |
| Leak Rate | ≤ 1×10⁻⁹ mbar·L/s |
| Operating Pressure | Vacuum to 1 bar |
| Operating Temperature | -20°C to 400°C (depending on material) |